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Preprint
This is the submitted version of a paper presented at 10th Micronano Systems Workshop (MSW), 15-16
May, 2014, Uppsala, Sweden.
Citation for the original published paper:
Andersson, M., Knaust, S., Ogden, S., Hjort, K., Bodén, R. (2014)
Integrated high-pressure fluid manipulation in microfluidic systems.
In:
N.B. When citing this work, cite the original published paper.
Permanent link to this version:
http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-239206
Oral or poster
INTEGRATED HIGH-PRESSURE FLUID MANIPULATION IN
MICROFLUIDIC SYSTEMS
Martin Andersson, Stefan Knaust, Sam Ogden, Klas Hjort and Roger Bodén
Uppsala University, Department of Engineering Sciences, Uppsala, Sweden
E-mail: [email protected]
Abstract
This paper presents microfluidic systems with integrated miniaturized high-pressure valves and
pumps. The valves and pumps are driven by paraffin phase change material actuators. Due to its high
energy density as an actuator material, paraffin is ideal for miniaturization of high pressure
components. The systems are fabricated by multilayer bonding of different functional layers with
stainless steel stencils as main construction material. The system integration is exemplified by two
applications; the first application is a previously presented deep-sea sampler with integrated bistable
high-pressure valves that handles 125 bar (12.5 MPa). In the second example we present a pump
system for reduced flow variations and integrated sample injectors for high performance liquid
chromatography. The combination of this multilayer fabrication method with paraffin actuation shows
great potential for achieving high-pressure microfluidic systems with integrated fluid manipulation.
Introduction
Integrated microfluidic manipulation is often identified as an area that can realize the true potential of
microfluidics and micro total analysis systems (µTAS). Different solutions for miniaturized pumps
and valves have been presented [1-3], with various degrees of integration.
As all interfaces add both dead volume and risk of leakage, all components should ideally be
situated on the same chip. For high-pressure microfluidics like high performance liquid
chromatography (HPLC) and microreactors, one of the main challenges in creating such a chip is the
integration of high-pressure pumps and valves [4].
In microfluidic applications, valves are often crucial components. They are generally divided into
passive and active types [3], with bistable or latchable valves as a sub-group of active valves. Passive
valves change states using the systems’ internal energy, whereas active valves demand external energy
input for switching to and holding its non-equilibrium state. Consequently, active valves are easier to
adapt to the specific needs of a system. Latchable and bistable valves combine the versatility of an
active valve with low power consumption by only demanding power during the switching between
states. This is important in power-restricted applications still demanding the higher performance level
associated with active valves. Especially in high-pressure microfluidics, the combination of high leak
pressure, low power consumption and timely switching is desirable.
The most common approach to integrated high-pressure manipulation is either electrolysis-based
electrochemical (EC) pumps [5-6], or electro-osmotic flow (EOF) controlled valves [7] and pumps [810]. Drawbacks associated with EOF pumps are high voltages as well as the need for a certain range
of pH and conductance, limiting the samples and solvents that can be used for analysis. EC pumps do
not have the same limitations regarding samples and solvents. Instead, the challenges are oxidizing
electrodes and current stability. Despite reports of EC pumps being able to handle pressures of 200
MPa [6], most integrated EC-based pumps reside in the region of 0.7-1.0 MPa, typically limiting the
applicability, e.g. limited column length in HPLC.
For high-pressure capability of miniaturized pumps and valves, the actuator material is an
important factor. To ensure large enough forces and strokes of the miniaturized and integrated
actuator, an actuator material with a high energy density is needed. Phase change materials, e.g.
paraffin, have the highest energy density among common actuator materials, Figure 1, for repeatable
use and hence they are an attractive choice for high pressure applications [11].
Paraffin actuated pumps and valves rely on the expansion associated with the solid-liquid phase
transition of paraffin. These pumps have demonstrated pressures up to 13 MPa [12-14] without
affecting the flow rate and active valves can handle more than 20 MPa [15]. For bistable valves a
pressure of 2.5 MPa has been achieved [16]. Hence, these pumps and valves can prove to be key
components for realizing truly integrated high-pressure microfluidic systems.
Oral or poster
In the following, two different concepts of microfluidic systems with integrated high-pressure fluid
manipulation are exemplified. The first is a microfluidic deep-sea sampler for a miniaturized
submersible with integrated high-pressure valves from the group of Thornell [17]. The valves are
bistable for lower energy consumption in energy limited applications. As the second concept we
present a pump system for HPLC with integrated pumps for both the mobile phase and the sample
injection.
Operating principle
The core of these paraffin actuated pumps and valves is the actuator. It consists of paraffin that is
encapsulated with a rigid surrounding and a flexible membrane. When paraffin is melted by an
integrated heater it expands and pushes the membrane to a deflected state. When the paraffin is let to
solidify, by deactivating the heater, it contracts which returns the membrane to its original state. In this
manner, the paraffin actuator membrane is used to close and open valves and perform pumping
actions.
By using different geometries and by controlling the solidification of paraffin it is also possible to
accomplish bi or multistable actuators that only consume energy when changing state, e.g. when
opening or closing a valve.
Fabrication
The fabrication of actuators, valves, pumps and systems are made by stacking and bonding different
functional layers, exemplified in Figure 2. The main layers are stainless steel stencils as structural
material for actuators and fluidic channels. Additional layers can be added for different functions, e.g.
flexible printed circuit boards for heaters, thermistors and integration of electronics, and glass for
optical functions.
All stainless steel sheets are photochemically machined (Precision micro Ltd., UK) to define
geometries, whereas the membrane was milled in a circuit board plotter (Protomat S-100, LPKF Laser
& Electronics AG, Germany), and the heater layer was first wet etched (Na2(SO4)2:H2O 20g:100ml,
50°C) to define the resistive heaters from the copper cladding and subsequently etched in a reactive
ion etch (15 sccm O2, 5 sccm CHF3, 150 W, 200 mTorr) to define through-holes and outer geometry.
All parts, except the covering back plate were coated with Parylene C (LabTop model 3000, Para Tech
Coating Inc., USA), functioning as a bonding agent. The coated sheets were stacked and
thermocompressively bonded in two steps (30 min, 200°C at 90 mbar and 30 min, 240°C at
atmospheric pressure). Paraffin (CAS 8002-74-2, Sigma-Aldrich Co., USA) was casted into its
designated cavities and excess paraffin was removed using a razor. Finally the back stencil was glued
(Loctite 407) to the stack to seal the structure.
Figure 1. Energy densities for common actuator materials, adapted from [11].
Oral or poster
Applications
Microfluidic deep-sea sampler
The strong latchable valve from [16] has been modified and integrated into a microfluidic sampler by
the group of Thornell [17]. The sampler was intended for a miniature submersible, enabling microbial
sampling in previously unreachable underwater environments. Here, the need was a high-pressure
bistable valve, managing the harsh demands of deep-sea sampling while maintaining long closing
times. The sampler is shown in Figure 3. It has a sample collector formed in the top stainless steel
stencil and a glass window for optical analysis of the trapped substances. Inside it incorporates an
ultrasonic particle trap and bistable valves on inlet and outlet that secure the trapped sample for later
analysis.
The valve managed to stay closed without power supplied at an applied pressure kept above 2.1
MPa for 19 hours, whereupon slight (50 nL/min) leakage was observed. This leakage was remedied by
reactivating the valve, proving that the valve can be used for longer timeframes as long as it is
regularly reactivated. The reactivation doesn’t induce additional leakage during latching. For shorter
timeframes, the valve was operated up to 12.5 MPa without leakage. The valve’s burst pressure was
determined to 20 MPa.
A separate valve was dedicated for measuring the capability to seal against air pressure in [18].
This valve managed to stay closed without power consumption up to 5.3 MPa of air pressure and 5.7
MPa of water pressure. The difference in pressure capability compared to the first valve may be
explained by air trapped in the paraffin chamber.
Figure 2. Example from the deep see sampler of stacking of stainless steel stencils, flexible printed
circuit boards and glass, adapted from [17].
Figure 3. Microfluidic deep-sea sampler incorporating bistable high-pressure valves, from [17].
Oral or poster
Miniaturized high performance liquid chromatography
Earlier publications [12-14] have shown the pressure capability of stainless steel paraffin-actuated
micropumps. However, since all have been peristaltic pumps, a fairly high flow rate variation has been
present, which induces peak broadening in HPLC and variations in reagent availability in
microreactors, and consequently makes these pumps unsuitable for these purposes.
In the system presented here, we combine the operation of two integrated micropumps for solvent
delivery, Figure 4, to reducing the flow rate variation significantly [19]. The pumping of individual
and combined operation is seen in Figure 5.
In addition, two smaller pumps are integrated for versatile and well-controlled sample injections.
The targeted application is initially miniaturized HPLC. Additionally, the miniaturized pump system
can be adapted for other microfluidic high-pressure applications as well.
The multi-pump system chip for HPLC is built from stainless steel sheets, a polyimide membrane,
and an integrated heater layer made from a sheet of copper-clad polyimide. The overall dimensions of
the chip are 40 x 25 x 1 mm3. The designed stroke volume of the injector pumps is 60 nL. For sample
delivery, the channel between the two injector pumps can be filled by these pumps and used as a
sample loop designed to 50 nL. Alternatively, one of the injector pumps can be used to inject a sample
directly into the main channel, either its full volume or a variable amount.
Figure 4. Left: Photograph of the fabricated chip. Right: Top view of the system, showing the channel
system, and the twelve actuators that drives the two mobile phase pumps and two sample injection
pumps.
Figure 5. Pumping performance of the system. (a) and (b): Pump 1 and 2 respectively driven
individually, and (c): Both pumps driven in a combined operation.
Oral or poster
Conclusion
Integration of high-pressure fluid manipulation has been successfully shown in two different system
concepts. The combination of the multilayer fabrication technique based on stainless steel stencils with
paraffin actuation has great potential for realization of high-pressure microfluidic systems with
integrated fluid manipulation.
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