...

Revision 1.1 10/27/2006

by user

on
Category: Documents
20

views

Report

Comments

Transcript

Revision 1.1 10/27/2006
Integrated Metrology Center Present Capabilities
Revision 1.1
10/27/2006
I.
Electrical – DC & Low Frequency
Parameter / Equipment
DC Volts
(Measure)
10.0 V
1.0 V
1.018 V
Best1 Measurement
Capability (±)
.06 µV / V
0.1 µV / V
0.1 µV / V
0.1 V
1V
10 V
100 V
1000 V
0.00 mV to 220 mV
> 220 mV to 2.2 V
(> 2.2 to 11) V
(> 11 to 22) V
(> 22 to 220) V
(> 220 to 1100) V
(0 to 120) mV
(0.1 to 1.2) V
(1 to 12) V
(10 to 120) V
(100 to 1000) V
0.56 µV / V
0.32 µV / V
0.25 µV / V
0.32 µV / V
0.56 µV / V
6 µV/V + 0.4 µV
3.5 µV/V + 0.7 µV
2.5 µV/V + 2.5 µV
2.5 µV/V + 4 µV
3.5 µV/V + 40 µV
4.5 µV/V + 400 µV
5.4 µV/V + 0.4 µV
3.5 µV/V + 0.4 µV
2.8 µV/V + 0.6 µV
4.8 µV/V + 40 µV
17 µV/V + 110 µV
Secondary Level: Zener Stds with
Fluke 752A divider
100 uA to 1 Amp
1 A – 10 A
10 A – 100 A
100 A – 300 A
2 µV / V
0.01%
0.05%
0.10%
Measured V across transfer standard resistance
Guildline 9211A
Ballentine
(0 to 220) µA
> 220 µA to 2.2 mA
(> 2.2 to 22) mA
(> 22 to 220) mA
> 220 mA to 2.2 A
(> 2.2 to 11) A
0.0001 Ω
0.001 Ω
0.01 Ω
0.1 Ω
1Ω
10 Ω
100 Ω
1 KΩ
10 KΩ
100 KΩ
1 MΩ
10 M
10 M - 100 MΩ
100 M - 1 GΩ
1G - 10GΩ
10G - 100GΩ
100G - 1TΩ
1T - 10TΩ
10T - 100TΩ
100T - 1PΩ
(1, 1.9) Ω
(10, 19) Ω
(100, 190) Ω
(1, 1.9, 10, 19) kΩ
(100, 190) kΩ
1 MΩ
1.9 MΩ
10 MΩ
19 MΩ
35 µA/A + 6 nA
30 µA/A + 7 nA
30 µA/A + 40 nA
40 µA/A + 0.7 µA
60 µA/A + 12 µA
0.034 % + 480 µA
3 µΩ / Ω
1.5 µΩ / Ω
1.2 Ω / Ω
1.0 µΩ / Ω
0.15 µΩ / Ω
0.15 µΩ / Ω
0.3 µΩ / Ω
0.3 µΩ / Ω
0.3 µΩ / Ω
1.5 µΩ / Ω
3.0 µΩ / Ω
5 µΩ / Ω
350 µΩ / Ω
500 µΩ / Ω
700 µΩ / Ω
1000 µΩ / Ω
2000 µΩ / Ω
3000 µΩ / Ω
5000 µΩ / Ω
10000 µΩ / Ω
80 µΩ / Ω
21 µΩ / Ω
9 µΩ / Ω
7.5 µΩ / Ω
9 µΩ / Ω
15 µΩ / Ω
16 µΩ / Ω
31 µΩ / Ω
39 µΩ / Ω
Fluke 5720A
Range
Comments
Primary Level:
Josephson Voltage Standard (JVS)
Working and Check Zener Standards
DC Voltage (Measure and Source)
(Generate)
(Measure)
DC Current
(Measure)
(Source)
Resistance
(measure)
(Source)
(calibration of high-performance
meters and calibrators)
Fluke 5720A
Hewlett Packard 3458A (Opt 002)
Fluke 5720A with 5725A
Automated with
with MI-6000 and MI-6010 bridges
and 6011B range extender
Guildline 6500
Digital Teraohmmeter
Fluke 5720A
100 MΩ
95 µΩ / Ω
(0 to 12) Ω
(10 to 120) Ω
(0.1 to 1.2) kΩ
(1 to 12) kΩ
(10 to 120) kΩ
(0.1 to 1.2) MΩ
(1 to 12) MΩ
(10 to 120) MΩ
120 M – 1 GΩ
1 – 20 V, 10 Hz – 1 MHz
30 – 100 V, 10 Hz – 200 kHz
200 – 1000 V, 40 Hz – 100 kHz
2.2mV to 1000 V
0.2 mV - 1100 V
10 Hz to 1 Mhz
20 µΩ / Ω
15 µΩ / Ω
9 µΩ / Ω
9 µΩ / Ω
9 µΩ / Ω
14 µΩ / Ω
60 µΩ / Ω
510 µΩ / Ω
5010 µΩ / Ω
10 – 84 µV / V
10 – 86 µV / V
16 – 60 µV / V
see published spec
see published spec
Hewlett Packard 3458A (Opt 002)
AC Current
(Measure)
(5-13 mA) 10 Hz to 10 kHz
(13 mA to 1A) 10 Hz to 30 kHz
(1 to 26 A) 45 Hz to 10 kHz
60 µA / A
60 µA / A
60 µA / A
Holt HCS-1 AC Shunt Set
and Holt 84560 TE
and automated system
AC Current (Source)
0.2 mA – 11 A
20 Hz to 10kHz
see published spec
Fluke 5720A with 5725A
Capacitance
1.0 pF
3.0 µF/F [2]
Andeen-Hagerling 1100
(Source)
10 pF
2.0 µF/F [2]
100 pF
2.0 µF/F [2]
1000 pF
0.01% [1]
GenRad 1404-A
0.002 µF
0.05% [1]
GenRad 1409-G
0.005 µF
0.05%
[1]
GenRad 1409-K
0.05%
[1]
GenRad 1409-T
0.05%
[2]
GenRad 1409-Y
(Measure)
AC Voltage
(Measure)
AC Voltage (cont.)
(Generate)
0.1 µF
Holt 11 Thermal Transfer Standards
& Fluke 792A
Fluke 5790
Fluke 5720A with 5725A
1 µF
0.1 pF
0.10% [1]
Boonton CS-.1 (PT)
1.0 pF
0.10% [1]
Boonton CS-1 (PT)
1.0 pF
0.032% [2]
10 pF
0.10% [1]
Boonton 76-1A/10 (PT)
0.016% [2]
1.0 pF - 1 µF (increments of 1 pF)
0.05% [1]
GenRad 1413
1 µf, 10 µF, 100 µF, 1 mF, 10 mF
0.04% [1]
GenRad 1417
10 µF – 100 µF (10 µF/step)
0.10% [1]
GenRad 1425A
0.01%
[1]
[2]
Nominal Accuracy
[2]
(Measure)
Inductance
(Source)
0 – 1.2 µF (1.00 kHz)
0.00001pF - 99999µF
(12 Hz – 200 kHz)
100 µH
1 mH
10 mH
100 mH
1H
10 H
200 µH
2 mH
20 mH
200 mH
2H
500 µH
5 mH
Calibration Accuracy
3.0 µF/F
0.02%
Andeen-Hagerling 2500A
GenRad 1693
0.04%
0.03%
0.01%
0.03%
0.03%
0.03%
0.06%
0.03%
0.01%
0.04%
0.03%
0.03%
0.01%
GenRad 1482-B
GenRad 1482-E
GenRad 1482-H
GenRad 1482-L
GenRad 1482-P
GenRad 1482-T
GenRad 1482-C
GenRad 1482-F
GenRad 1482-J
GenRad 1482-M
GenRad 1482-Q
GenRad 1482-D
GenRad 1482-G
(Measure)
0.00001mH – 99999H
(12 Hz – 200 kHz)
0.02%
GenRad 1693
Phase
(Source)
1 Hz – 1 kHz
1 kHz – 6.25 kHz
6.25 kHz - 50 kHz
50 kHz – 100 kHz
10 Hz – 20 Hz
20 Hz – 100 kHz
100 kHz – 10 MHz
(10 + 0.1R) m˚
(20 + 0.2R) m˚
(30 + 0.3R) m˚
(100 + R) m˚
0.1˚
0.025˚
0.1˚ per 100kHz above
100kHz
Clark Hess 5500
(Measure)
Dimensional
II.
Parameter / Equipment
Range
Length
Angle
Inside Diameter, Outside Diameter
CMM
Roundness
Surface Finish
Flatness
Physical Optics
III.
Best1 Measurement
Capability (±)
8 inch
4 µ inch
20µ inch
0.0001778 mm
0.0001778 mm
30 µ inch
+/-0.4 arc sec
+/- 0.2 arc sec
+/- 0.5 arc sec
+/-1 arc sec per ea. 100 sec
5 µ inch
460 µ inch
0.5 µ inch
1 to 0.04 mm
+/- 3% of I.V
1 to 0.04 mm
+/- 3% of I.V
0.01 – 4.0 in
4.0 - 20.0 in
2.0005 to 100 mm
2.0005 to 100 mm
0-60 inch
1 sec - 45 deg
0-10 sec
10-100 sec
100 - 400 sec
Gage Blocks
0.02-14in
60 in volume
1 to 0.04 mm
+/- 3% of I.V
50 mm
10 µin
+/- 3% of I.V
4 feet to Optical Infinity
3 µ inch
+/- 0.5 arc seconds
Comments
Comparator
Comparator
Comparator
Comparator
Renshaw Laser
Angle Gage Block
Infrared autocollimator
Infrared autocollimator
Infrared autocollimator
Comparison
Ball Bar
Federal Form Scan 3200
Dimension (Stylus movement resolution)
Waviness (Stylus movement resolution)
Roughness (Stylus movement resolution)
Range in the Horizontal direction
Optical Flat
Brunson Optical Test Stand
Time and Frequency
Parameter / Equipment
Frequency
IV.
Range
Best1 Measurement
Capability (±)
1 MHz
2.2 x 10¯13
5 MHz
2.2 x 10¯13
10 MHz
2.2 x 10¯13
Comments
5071A Cesium Beam
XL-DC True Time GPS Receiver
RF Microwave
Parameter / Equipment
Coaxial Attenuation
Coaxial Power
Pulse Peak Power
(CDMA, TDMA, GSM)
RF CW Generation
Phase Noise
Noise
Network Analysis
V.
Kron-Hite 6620
Mechanical
Range
20 Points over 90dB Range
@ 30 MHz
-120 to + 20 dB
Up to 26.5 GHz
0.3 nW – 25 Watts
100 kHz to 26.5 GHz
0.3 - 200 Watts
10 MHz - 500 MHz
-50 to 30 dBm
10 nW to 1 W
10 MHZ - 65 GHZ
1 Hz to 1KHz
1KHz to 100 KHz
5.0 to 7.0 dB
14.7 to 15.6 dB
12.7 to 15.3 dB
3.5mm, Type N, 7mm, 2.4mm
Up to 50Ghz
Best1 Measurement
Capability (±)
+/- 0.0002 dB/10dB
Comments
WBCO 310 Piston Attenuator
0.015 – 0.175 dB
8902A
0.25 to 2.9%
11760S
3%
+-2.2%
< 2 x 10 -9/Day
-54 +/- 1.5 dB
-175 +/- 3.5 dB
0.055 to 0.125 dB
0.048 to 0.090 dB
0.057 to 0.114 dB
Based on Kit used
ComTech/Bird Wattmeter Cal System
Agilent E9300 H25
Anritsu MG3696A
AeroFlex 9000B
346B-H13
346C-H05
Parameter / Equipment
Pressure (extreme low)
Pressure
Vacuum
Flow
Humidity
Dewpoint
Leak
Range
±30 inches water column
Torque
Scales –
Balances
Mass
Acceleration
(Sinusoidal – Comparison)
(Sinusoidal – Absolute)
(Shock)
Comments
Ruska 7252i
Digital Low Pressure Controller/Calibrator
0.2 to 1000 psia/psig
0 to 1000 psia
0 to 3000 / 6000 / 10,000 psia
15 to 16,000 psia
0 to 2000 / 4000 / 6000 / 10,000 /
18,000 / 30,000
30 to 75,000 psia
1 - 1000 torr
50 ppm of reading
0.01% of Reading
0.01% of FS
+/- 75 ppm
+/- 0.015% of FS
Ruska 2465 Pneumatic Dead Weight Piston Gage
DHI PPC3 Digital Pressure Controller/Calibrator
DHI PPCK+ Digital Pressure Controller/Calibrator
DHI PG7202 Dead Weight Piston Gage
DHI HGC-30000-AF Hydraulic Gage Calibrator
+/- 100 ppm
0.08% reading
DHI PG7302 Hydraulic Dead Weight Piston Gage
MKS Station
1 ccm to 50 lpm
50 - 1200 lpm
10 – 98 % RH
0 – 70° C Temperature Range
-95° to 10°C (0.04 - 12000 ppm)
0.2% of reading
0.2% of reading
0.50%
0.1° C
0.4° C (0.06 ppm @ 1 ppm)
2.50%
2.50%
2.50%
2.50%
0.002% of applied Force
0.01% of applied Force
0.02% of applied Force
0.002% applied load
0.1% of IV
NBS Circular 547-1 Class F
ASTM E-617 Class 1
0.04 mg
0.0009 mg to 17 mg
.05 ulb
.002 to 30 ulb
1.50%
1.20%
2.50%
1.00%
0.50%
1.00%
1.90%
2.60%
Sierra Cal Bench
American Bell Prover
Thunder Scientific 2500
10-6
10-7
10-8
10-9
Force
Best1 Measurement
Capability (±)
0.0075 % of reading
atm
atm
atm
atm
cc/sec
cc/sec
cc/sec
cc/sec
1 - 1000 LbF
10 - 100K LbF
100 - 500k LbF
10- 1000Lb
0 – 2500 Ft.Lb.
1 g – 270 kg
1 mg – 50 kg
1kg
1 mg to 20 kg
1 lb
1/16 oz to 20 lb
5.0 – 100 Hz
100 – 2500 Hz
2.50 –10.0 kHz
5.0 – 50 Hz
50 Hz – 5 kHz
5 – 10 kHz
20 – 2000 g;
2000 – 10000 g
≤ 20 g
≤ 20 g
≤ 20 g
Thunder Scientific 4500
Helium Leak Standard
Helium Leak Standard
Helium Leak Standard
Helium Leak Standard
Moorehouse Dead Weight Force Tester
Force Transducers
Force Transducers
Morehouse "L" Deadweight
Torque Tester
Dead Weight
Rice Lake ASTM E-617 Class 0 Primary Artifact
ASTM E-617 Class 1
ASTM Class 1
ASTM Class 1
Endevco 68357 AACS
Endevco 68357 with 2916A
Endevco 68357 with 2925
(half-sine pulse from 3 – 0.1 ms)
Thermodynamic
VI.
Parameter / Equipment
Temperature (Fixed Points)
(non contact)
Range
-40°C to 0°C
0°C to 100°C
100°C to150°C
150°C to 230°C
230°C to 420°C
50°C to 650°C
-189.3442° C
-38.8344° C
0.01° C
29.7646° C
231.928°
419.527° C
660.323° C
50 to 100° C
101 to 300° C
301 to 500° C
Best1 Measurement
Capability (±)
3.4 mK
3.2 mK
10 mK
6.1 mK
10 mK
0.5°C to 400°C
1.0°C to 650°C
1.68 mK
0.22 mK
0.21mK
0.72 mK
0.92 mK
1.03 mK
14.41 mK
0.5 °C
0.65 °C
0.8 °C
Comments
Platinum Resistance Thermometer with Bath
Hart 9103 Dry-Block Calibrator
Triple Point of Argon
Triple Point of Mercury Cell
Triple Point of Water Cell
Melting Point of Gallium Cell
Freezing Point of Tin Cell
Freezing Point of Zinc Cell
Freezing Point of Zinc Cell
Hart 9132 Portable Infrared Calibrator
1
note - Best Measurement Capability (±) is the theoretical / technology limited best ability.
Actual reported combined uncertainties for routine calibrations will typically be larger as they include statistical, environmental and other factors.
Fly UP