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Revision 1.1 10/27/2006
Integrated Metrology Center Present Capabilities Revision 1.1 10/27/2006 I. Electrical – DC & Low Frequency Parameter / Equipment DC Volts (Measure) 10.0 V 1.0 V 1.018 V Best1 Measurement Capability (±) .06 µV / V 0.1 µV / V 0.1 µV / V 0.1 V 1V 10 V 100 V 1000 V 0.00 mV to 220 mV > 220 mV to 2.2 V (> 2.2 to 11) V (> 11 to 22) V (> 22 to 220) V (> 220 to 1100) V (0 to 120) mV (0.1 to 1.2) V (1 to 12) V (10 to 120) V (100 to 1000) V 0.56 µV / V 0.32 µV / V 0.25 µV / V 0.32 µV / V 0.56 µV / V 6 µV/V + 0.4 µV 3.5 µV/V + 0.7 µV 2.5 µV/V + 2.5 µV 2.5 µV/V + 4 µV 3.5 µV/V + 40 µV 4.5 µV/V + 400 µV 5.4 µV/V + 0.4 µV 3.5 µV/V + 0.4 µV 2.8 µV/V + 0.6 µV 4.8 µV/V + 40 µV 17 µV/V + 110 µV Secondary Level: Zener Stds with Fluke 752A divider 100 uA to 1 Amp 1 A – 10 A 10 A – 100 A 100 A – 300 A 2 µV / V 0.01% 0.05% 0.10% Measured V across transfer standard resistance Guildline 9211A Ballentine (0 to 220) µA > 220 µA to 2.2 mA (> 2.2 to 22) mA (> 22 to 220) mA > 220 mA to 2.2 A (> 2.2 to 11) A 0.0001 Ω 0.001 Ω 0.01 Ω 0.1 Ω 1Ω 10 Ω 100 Ω 1 KΩ 10 KΩ 100 KΩ 1 MΩ 10 M 10 M - 100 MΩ 100 M - 1 GΩ 1G - 10GΩ 10G - 100GΩ 100G - 1TΩ 1T - 10TΩ 10T - 100TΩ 100T - 1PΩ (1, 1.9) Ω (10, 19) Ω (100, 190) Ω (1, 1.9, 10, 19) kΩ (100, 190) kΩ 1 MΩ 1.9 MΩ 10 MΩ 19 MΩ 35 µA/A + 6 nA 30 µA/A + 7 nA 30 µA/A + 40 nA 40 µA/A + 0.7 µA 60 µA/A + 12 µA 0.034 % + 480 µA 3 µΩ / Ω 1.5 µΩ / Ω 1.2 Ω / Ω 1.0 µΩ / Ω 0.15 µΩ / Ω 0.15 µΩ / Ω 0.3 µΩ / Ω 0.3 µΩ / Ω 0.3 µΩ / Ω 1.5 µΩ / Ω 3.0 µΩ / Ω 5 µΩ / Ω 350 µΩ / Ω 500 µΩ / Ω 700 µΩ / Ω 1000 µΩ / Ω 2000 µΩ / Ω 3000 µΩ / Ω 5000 µΩ / Ω 10000 µΩ / Ω 80 µΩ / Ω 21 µΩ / Ω 9 µΩ / Ω 7.5 µΩ / Ω 9 µΩ / Ω 15 µΩ / Ω 16 µΩ / Ω 31 µΩ / Ω 39 µΩ / Ω Fluke 5720A Range Comments Primary Level: Josephson Voltage Standard (JVS) Working and Check Zener Standards DC Voltage (Measure and Source) (Generate) (Measure) DC Current (Measure) (Source) Resistance (measure) (Source) (calibration of high-performance meters and calibrators) Fluke 5720A Hewlett Packard 3458A (Opt 002) Fluke 5720A with 5725A Automated with with MI-6000 and MI-6010 bridges and 6011B range extender Guildline 6500 Digital Teraohmmeter Fluke 5720A 100 MΩ 95 µΩ / Ω (0 to 12) Ω (10 to 120) Ω (0.1 to 1.2) kΩ (1 to 12) kΩ (10 to 120) kΩ (0.1 to 1.2) MΩ (1 to 12) MΩ (10 to 120) MΩ 120 M – 1 GΩ 1 – 20 V, 10 Hz – 1 MHz 30 – 100 V, 10 Hz – 200 kHz 200 – 1000 V, 40 Hz – 100 kHz 2.2mV to 1000 V 0.2 mV - 1100 V 10 Hz to 1 Mhz 20 µΩ / Ω 15 µΩ / Ω 9 µΩ / Ω 9 µΩ / Ω 9 µΩ / Ω 14 µΩ / Ω 60 µΩ / Ω 510 µΩ / Ω 5010 µΩ / Ω 10 – 84 µV / V 10 – 86 µV / V 16 – 60 µV / V see published spec see published spec Hewlett Packard 3458A (Opt 002) AC Current (Measure) (5-13 mA) 10 Hz to 10 kHz (13 mA to 1A) 10 Hz to 30 kHz (1 to 26 A) 45 Hz to 10 kHz 60 µA / A 60 µA / A 60 µA / A Holt HCS-1 AC Shunt Set and Holt 84560 TE and automated system AC Current (Source) 0.2 mA – 11 A 20 Hz to 10kHz see published spec Fluke 5720A with 5725A Capacitance 1.0 pF 3.0 µF/F [2] Andeen-Hagerling 1100 (Source) 10 pF 2.0 µF/F [2] 100 pF 2.0 µF/F [2] 1000 pF 0.01% [1] GenRad 1404-A 0.002 µF 0.05% [1] GenRad 1409-G 0.005 µF 0.05% [1] GenRad 1409-K 0.05% [1] GenRad 1409-T 0.05% [2] GenRad 1409-Y (Measure) AC Voltage (Measure) AC Voltage (cont.) (Generate) 0.1 µF Holt 11 Thermal Transfer Standards & Fluke 792A Fluke 5790 Fluke 5720A with 5725A 1 µF 0.1 pF 0.10% [1] Boonton CS-.1 (PT) 1.0 pF 0.10% [1] Boonton CS-1 (PT) 1.0 pF 0.032% [2] 10 pF 0.10% [1] Boonton 76-1A/10 (PT) 0.016% [2] 1.0 pF - 1 µF (increments of 1 pF) 0.05% [1] GenRad 1413 1 µf, 10 µF, 100 µF, 1 mF, 10 mF 0.04% [1] GenRad 1417 10 µF – 100 µF (10 µF/step) 0.10% [1] GenRad 1425A 0.01% [1] [2] Nominal Accuracy [2] (Measure) Inductance (Source) 0 – 1.2 µF (1.00 kHz) 0.00001pF - 99999µF (12 Hz – 200 kHz) 100 µH 1 mH 10 mH 100 mH 1H 10 H 200 µH 2 mH 20 mH 200 mH 2H 500 µH 5 mH Calibration Accuracy 3.0 µF/F 0.02% Andeen-Hagerling 2500A GenRad 1693 0.04% 0.03% 0.01% 0.03% 0.03% 0.03% 0.06% 0.03% 0.01% 0.04% 0.03% 0.03% 0.01% GenRad 1482-B GenRad 1482-E GenRad 1482-H GenRad 1482-L GenRad 1482-P GenRad 1482-T GenRad 1482-C GenRad 1482-F GenRad 1482-J GenRad 1482-M GenRad 1482-Q GenRad 1482-D GenRad 1482-G (Measure) 0.00001mH – 99999H (12 Hz – 200 kHz) 0.02% GenRad 1693 Phase (Source) 1 Hz – 1 kHz 1 kHz – 6.25 kHz 6.25 kHz - 50 kHz 50 kHz – 100 kHz 10 Hz – 20 Hz 20 Hz – 100 kHz 100 kHz – 10 MHz (10 + 0.1R) m˚ (20 + 0.2R) m˚ (30 + 0.3R) m˚ (100 + R) m˚ 0.1˚ 0.025˚ 0.1˚ per 100kHz above 100kHz Clark Hess 5500 (Measure) Dimensional II. Parameter / Equipment Range Length Angle Inside Diameter, Outside Diameter CMM Roundness Surface Finish Flatness Physical Optics III. Best1 Measurement Capability (±) 8 inch 4 µ inch 20µ inch 0.0001778 mm 0.0001778 mm 30 µ inch +/-0.4 arc sec +/- 0.2 arc sec +/- 0.5 arc sec +/-1 arc sec per ea. 100 sec 5 µ inch 460 µ inch 0.5 µ inch 1 to 0.04 mm +/- 3% of I.V 1 to 0.04 mm +/- 3% of I.V 0.01 – 4.0 in 4.0 - 20.0 in 2.0005 to 100 mm 2.0005 to 100 mm 0-60 inch 1 sec - 45 deg 0-10 sec 10-100 sec 100 - 400 sec Gage Blocks 0.02-14in 60 in volume 1 to 0.04 mm +/- 3% of I.V 50 mm 10 µin +/- 3% of I.V 4 feet to Optical Infinity 3 µ inch +/- 0.5 arc seconds Comments Comparator Comparator Comparator Comparator Renshaw Laser Angle Gage Block Infrared autocollimator Infrared autocollimator Infrared autocollimator Comparison Ball Bar Federal Form Scan 3200 Dimension (Stylus movement resolution) Waviness (Stylus movement resolution) Roughness (Stylus movement resolution) Range in the Horizontal direction Optical Flat Brunson Optical Test Stand Time and Frequency Parameter / Equipment Frequency IV. Range Best1 Measurement Capability (±) 1 MHz 2.2 x 10¯13 5 MHz 2.2 x 10¯13 10 MHz 2.2 x 10¯13 Comments 5071A Cesium Beam XL-DC True Time GPS Receiver RF Microwave Parameter / Equipment Coaxial Attenuation Coaxial Power Pulse Peak Power (CDMA, TDMA, GSM) RF CW Generation Phase Noise Noise Network Analysis V. Kron-Hite 6620 Mechanical Range 20 Points over 90dB Range @ 30 MHz -120 to + 20 dB Up to 26.5 GHz 0.3 nW – 25 Watts 100 kHz to 26.5 GHz 0.3 - 200 Watts 10 MHz - 500 MHz -50 to 30 dBm 10 nW to 1 W 10 MHZ - 65 GHZ 1 Hz to 1KHz 1KHz to 100 KHz 5.0 to 7.0 dB 14.7 to 15.6 dB 12.7 to 15.3 dB 3.5mm, Type N, 7mm, 2.4mm Up to 50Ghz Best1 Measurement Capability (±) +/- 0.0002 dB/10dB Comments WBCO 310 Piston Attenuator 0.015 – 0.175 dB 8902A 0.25 to 2.9% 11760S 3% +-2.2% < 2 x 10 -9/Day -54 +/- 1.5 dB -175 +/- 3.5 dB 0.055 to 0.125 dB 0.048 to 0.090 dB 0.057 to 0.114 dB Based on Kit used ComTech/Bird Wattmeter Cal System Agilent E9300 H25 Anritsu MG3696A AeroFlex 9000B 346B-H13 346C-H05 Parameter / Equipment Pressure (extreme low) Pressure Vacuum Flow Humidity Dewpoint Leak Range ±30 inches water column Torque Scales – Balances Mass Acceleration (Sinusoidal – Comparison) (Sinusoidal – Absolute) (Shock) Comments Ruska 7252i Digital Low Pressure Controller/Calibrator 0.2 to 1000 psia/psig 0 to 1000 psia 0 to 3000 / 6000 / 10,000 psia 15 to 16,000 psia 0 to 2000 / 4000 / 6000 / 10,000 / 18,000 / 30,000 30 to 75,000 psia 1 - 1000 torr 50 ppm of reading 0.01% of Reading 0.01% of FS +/- 75 ppm +/- 0.015% of FS Ruska 2465 Pneumatic Dead Weight Piston Gage DHI PPC3 Digital Pressure Controller/Calibrator DHI PPCK+ Digital Pressure Controller/Calibrator DHI PG7202 Dead Weight Piston Gage DHI HGC-30000-AF Hydraulic Gage Calibrator +/- 100 ppm 0.08% reading DHI PG7302 Hydraulic Dead Weight Piston Gage MKS Station 1 ccm to 50 lpm 50 - 1200 lpm 10 – 98 % RH 0 – 70° C Temperature Range -95° to 10°C (0.04 - 12000 ppm) 0.2% of reading 0.2% of reading 0.50% 0.1° C 0.4° C (0.06 ppm @ 1 ppm) 2.50% 2.50% 2.50% 2.50% 0.002% of applied Force 0.01% of applied Force 0.02% of applied Force 0.002% applied load 0.1% of IV NBS Circular 547-1 Class F ASTM E-617 Class 1 0.04 mg 0.0009 mg to 17 mg .05 ulb .002 to 30 ulb 1.50% 1.20% 2.50% 1.00% 0.50% 1.00% 1.90% 2.60% Sierra Cal Bench American Bell Prover Thunder Scientific 2500 10-6 10-7 10-8 10-9 Force Best1 Measurement Capability (±) 0.0075 % of reading atm atm atm atm cc/sec cc/sec cc/sec cc/sec 1 - 1000 LbF 10 - 100K LbF 100 - 500k LbF 10- 1000Lb 0 – 2500 Ft.Lb. 1 g – 270 kg 1 mg – 50 kg 1kg 1 mg to 20 kg 1 lb 1/16 oz to 20 lb 5.0 – 100 Hz 100 – 2500 Hz 2.50 –10.0 kHz 5.0 – 50 Hz 50 Hz – 5 kHz 5 – 10 kHz 20 – 2000 g; 2000 – 10000 g ≤ 20 g ≤ 20 g ≤ 20 g Thunder Scientific 4500 Helium Leak Standard Helium Leak Standard Helium Leak Standard Helium Leak Standard Moorehouse Dead Weight Force Tester Force Transducers Force Transducers Morehouse "L" Deadweight Torque Tester Dead Weight Rice Lake ASTM E-617 Class 0 Primary Artifact ASTM E-617 Class 1 ASTM Class 1 ASTM Class 1 Endevco 68357 AACS Endevco 68357 with 2916A Endevco 68357 with 2925 (half-sine pulse from 3 – 0.1 ms) Thermodynamic VI. Parameter / Equipment Temperature (Fixed Points) (non contact) Range -40°C to 0°C 0°C to 100°C 100°C to150°C 150°C to 230°C 230°C to 420°C 50°C to 650°C -189.3442° C -38.8344° C 0.01° C 29.7646° C 231.928° 419.527° C 660.323° C 50 to 100° C 101 to 300° C 301 to 500° C Best1 Measurement Capability (±) 3.4 mK 3.2 mK 10 mK 6.1 mK 10 mK 0.5°C to 400°C 1.0°C to 650°C 1.68 mK 0.22 mK 0.21mK 0.72 mK 0.92 mK 1.03 mK 14.41 mK 0.5 °C 0.65 °C 0.8 °C Comments Platinum Resistance Thermometer with Bath Hart 9103 Dry-Block Calibrator Triple Point of Argon Triple Point of Mercury Cell Triple Point of Water Cell Melting Point of Gallium Cell Freezing Point of Tin Cell Freezing Point of Zinc Cell Freezing Point of Zinc Cell Hart 9132 Portable Infrared Calibrator 1 note - Best Measurement Capability (±) is the theoretical / technology limited best ability. Actual reported combined uncertainties for routine calibrations will typically be larger as they include statistical, environmental and other factors.