09_Giacomini_TrentoWS_ParisEdgeLess

Performance Of Thin Edgeless n-on-p
Planar Pixel Sensors for ATLAS
Upgrades
A. Bagolini1, M. Bomben2, M. Boscardin1, L. Bosisio3, G. Calderini2,4,
J. Chauveau2, G. Giacomini1, A. La Rosa5, G. Marchiori2, N. Zorzi1
1 - Fondazione Bruno Kessler (FBK), Trento, Italy
2- Laboratoire de Physique Nucleaire et de Hautes Énergies (LPNHE), Paris, France
3- Università di Trieste, Dipartimento di Fisica and INFN, Trieste, Italy
4- Dipartimento di Fisica, Università di Pisa, and INFN Sez. di Pisa, Pisa, Italy
5- Section de Physique (DPNC), Université de Genève, Genève, Switzerland
9th “Trento” Workshop on Advanced Silicon Radiation Detectors
(3D and p-type Technologies)
Genova, February 26th-28th 2014
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Edgeless pixels via DRIE
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Joint FBK-LPNHE project
Goal: thin, edgeless pixel sensors
Target: intermediate layers
How: make the border a damage
free ohmic contact by DRIE
• 200 μm thick n-on-p production
• 500 μm temporary support
wafer
• Pixel-to-trench distance as low
as 100 μm
Main production splits:
• p-spray dose
• p-stop: present/absent
• metal overhang: present/absent
• 1 wafer with no DRIE
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FEI4 sensors characteristics
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The active edge project

Goal: HL-LHC ATLAS intermediate
pixel layer
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n-on-p production

Pixel/trench distance as low as 100 μm
Field plate
p-stop
n-pixel
Substrate
contact
p-spray
p-substrate
oxide
Support wafer
oxide
Trench
(poly filling)
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EdgeLess Pixel Test Structures
Pixel pitch =
250 mm x 50 mm
No GR
1 GR
2 GR
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Breakdown studies
p-spray dose = 3e12 cm-2
p-spray dose = 5e12 cm-2
Little dependence on trench distance
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I-V on FE-I4 sensor
Automatic measurement with Temporary metal
trench
Pads of temporary metal
Temporary metal
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I-V vs p-spray doses
p-spray dose = 3e12 cm-2
p-spray dose = 5e12 cm-2
P-spray dose: 5x1012/cm2
VBD as expected from IV on test structures
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Irradiation at JSI (Ljubljana)
F: 2.5E15 1-MeV neq /cm2
• Samples were irradiated with reactor neutrons (JSI, Ljubljana)
– Limited annealing at room temperature
Measurements on a pad diode
I–V
log(C) – log(V)
α ~ 4.7x10-17 A/cm
Results in agreement
with literature
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Interpixel resistance after irradiation
p-spray dose = 3x1012/cm2
Excellent pixel isolation
even after irradiation
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Irradiated FEI4 test structures
IPAD [A]
p-spray dose = 3x1012/cm2
No GR
1,2,3 GRs
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IGR [A]
Irradiated FEI4 test structures
3 GRs
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FE-I4 modules
Temporary
metal
trench
Before temporary metal removal
After temporary metal removal
after resist patterning
• Modules are being assembled at IZM
by bump-bonding a few FE-I4 sensors to
FE-I4B ROC
• Delivery expected by end of November
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2 modules assembled for test
 sensor S9  400 µm & 10 GRs
 sensor S7  200 µm & 3 GRs
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400 µm, 10 GRs
It is
It was
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Source scan
Disconnected
pixels
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Conclusions & Outlook
• Irradiates structures: OK
• FE-I4 two test modules: mixed results
– Tackling issues
• Next: 10 modules to be assembled
• Goal: on beam next autumn
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