Slides - Agenda

Ion beam microfabrication
on diamond
P. Olivero
Physics Department – University of Torino
INFN sez. Torino
DIAMED & FARE experiments
FIRB project
Roma, 6 dicembre 2012
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Overview
The INFN-To group
DIAMED experiment
• IBIC characterization of diamond detectors
• ion-beam fabrication & characterization of 3D diamond detectors
• fabrication of detector-grade thin membranes
FARE experiment
• project overview
• ion-induced variation of refractive index in diamond
• fabrication of bulk waveguides in diamond
FIRB “Futuro in Ricerca 2010” project
• diamond-based cellular biosensors
• diamond-based single photon emitters
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The INFN-To group
http://www.dfs.unito.it/solid/index.html
Debora Angelici
Alfio Battiato
Federico Bosia
Jacopo Corsi
Jacopo Forneris
Daniele Gatto Monticone
Alessandro Lo Giudice
Paolo Olivero
Federico Picollo
Alessandro Re
Ettore Vittone
INFN – group V
Dip. Fisica, UniTo
NIS Centre of Excellence, UniTo
Consorzio CNISM
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DIAMED
IBIC characterization of diamond detectors
IBIC: Ion Beam Induced Charge
LNL – AN2000
Alchimia
L-IBIC on CVD diamond detectors
2 MeV H+
 = 2 μm
RBI – LIBI
SPIRIT
Uni Roma “Tor Vergata”
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DIAMED
Ion-beam fabrication & characterization
of 3D diamond detectors
Fabrication
IBIC characterization
1.8 MeV He+
 = 10 μm
LNL: AN2000 - DiaFab
Uni Roma “Tor Vergata”
4 MeV He+
RBI: LIBI - SPIRIT
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DIAMED
Fabrication of detector-grade thin membranes
Process
HPHT substrate
B-doped CVD
Uni Roma “Tor Vergata”
RBI: LIBI - SPIRIT
Preliminary results
graphite
intrinsic CVD
B-doped CVD layer: 8 μm
ions: 9 MeV C (F = 6·1016 cm-2) → 4 μm
intrinsic CVD layer: 37 μm
fragment: 50 μm ×1 mm
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FARE
Overview
Teams:
• INFN-Fi (L. Giuntini)
• INFN-To (A. Lo Giudice)
Instrumentation:
• development of apparatus for the detection of forward scattered ions
(→ STIM, FS techniques)
• development of IBIL (Ion Beam Induced Luminescence)
• extraction of heavy ion microbeams (C, Li, …)
Applications:
• characterization of cultural heritage samples (lapis lazili)
• optical functionalization in diamond
• electrical functionalization of diamond
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FARE
Ion-induced variation of refractive index
Methods
Results
external ion μ-beam line
2, 3, 5 MeV H+
F = 1013 – 1017 cm-2
INFN - LABEC
laser-beam interferometric microscopy
CNR - INO
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FARE
Fabrication of bulk waveguides in diamond
Methods
Results
Interferometric map
FEM simulation
CNR - INO
No waveguide
INFN - LABEC
INFN - Fi
CIBA - NUS
Waveguide
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FIRB
Diamond-based cellular biosensors
Microfabrication
Device characterization
Chromaffine cells
LNL: AN2000 - DiaFab
Neuroscience Dept.: NIS - UniTo
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FIRB
Diamond-based single-photon emitters
Ion implantation
Results
Single-photon confocal fluorescence microscopy
INFN – LNL & LABEC
RBI – LIBI
Uni Bochum – RUBION
1,0
Norm. Counts.
0,8
0,6
0,4
0,2
0,0
560
580
600
620
640
660
680
700
720
740
760
Wavelenght (nm)
200 μm
INRiM – Quantum Optics Group
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Thank you for your attention!
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